MAXIM

The Hiden MAXIM SIMS analyser is a state of the art triple filter secondary ion mass spectrometer for static and dynamic SIMS and SNMS applications.

The MAXIM analyser system includes an integral energy filter for ion acceptance at 30o to the probe axis, high transmission SIMS extraction ion optics, triple mass filter, pulse ion counting detector, and control electronics with Windows® compatible MASsoft Professional PC software.

MAXIM has a sensitivity of greater than 3 million counts per nano amp of primary beam current when monitoring the aluminium atomic ion emitted from an aluminium target bombarded by a 5keV Argon primary beam and a useful yield for boron in silicon in excess of 0.02% when bombarded with oxygen at 5 keV.

The analyser includes a front end mounted electron impact ion source that provides for a high sensitivity secondary neutral mass spectrometry for quantitative analysis of metallurgical thin films, alloys and dielectric materials.

The MAXIM SIMS analysers are supplied fully assembled on a DN-100-CF (6″ OD) Conflat type mounting flange. A UHV standard vacuum gauge with pressure sensing relay interlock is required for mass spectrometer protection. A UHV total pressure gauge is offered on request as an optional accessory.

Hiden MAXIM probes are directly PC controlled, Windows® MASsoft Professional PC software is included as standard and provides comprehensive data acquisition and presentation routines.

Standard system features

• Positiveand negative ion analy
• Hightransmission SIMS extraction ion opt
• SNMSfor quantitative analysis at matrix 
• Targetpotential output for optimum SIMS and SNMS efficiency.
• Outputsfor raster control of the primary ion gun with user programmable gating to define optimum data acquisition in depth profiling applications.
• Windows®-MASsoftProfessional PC software compatible with Ethernet, LAN, USB and RS232 c