{"id":3429,"date":"2024-01-25T14:25:17","date_gmt":"2024-01-25T07:25:17","guid":{"rendered":"https:\/\/demo9.thuythu.vn\/reeco\/?post_type=product&#038;p=3429"},"modified":"2024-01-25T14:25:17","modified_gmt":"2024-01-25T07:25:17","slug":"imp-epd","status":"publish","type":"product","link":"https:\/\/demo9.thuythu.vn\/reeco\/en\/san-pham\/imp-epd\/","title":{"rendered":"IMP-EPD"},"content":{"rendered":"","protected":false},"excerpt":{"rendered":"<ul>\n<li>Model: IMP-EPD<\/li>\n<li>Manufacturer: Hiden Analytical<\/li>\n<\/ul>\n<p data-sourcepos=\"1:1-1:56\">Mass spectrometers for ion beam etching applications<\/p>\n<p><span style=\"font-weight: 400;\">The HAL IMP-EPD ion milling probe end point detectors can be configured for manual or automatic end point detection. The IMP-EPD systms are quadrupole mass spectrometers with ion optics and integral energy filter for direct analysis of secondary ions from the etch process. The secondary ions provide precise information about the wafer surface layer composition in real time through the etch process..<\/span><\/p>\n<p><b>Applications<\/b><\/p>\n<ul>\n<li style=\"font-weight: 400;\" aria-level=\"1\"><span style=\"font-weight: 400;\">End point analysis<\/span><\/li>\n<li style=\"font-weight: 400;\" aria-level=\"1\"><span style=\"font-weight: 400;\">Target impurity determination<\/span><\/li>\n<li style=\"font-weight: 400;\" aria-level=\"1\"><span style=\"font-weight: 400;\">Quality control\/SPC<\/span><\/li>\n<li style=\"font-weight: 400;\" aria-level=\"1\"><span style=\"font-weight: 400;\">Residual gas analysis<\/span><\/li>\n<li style=\"font-weight: 400;\" aria-level=\"1\"><span style=\"font-weight: 400;\">Leak detection<\/span><\/li>\n<\/ul>\n","protected":false},"featured_media":3427,"comment_status":"open","ping_status":"closed","template":"","meta":[],"product_cat":[348],"product_tag":[],"acf":[],"lang":"en","translations":{"en":3429,"vi":3426},"pll_sync_post":[],"_links":{"self":[{"href":"https:\/\/demo9.thuythu.vn\/reeco\/wp-json\/wp\/v2\/product\/3429"}],"collection":[{"href":"https:\/\/demo9.thuythu.vn\/reeco\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/demo9.thuythu.vn\/reeco\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/demo9.thuythu.vn\/reeco\/wp-json\/wp\/v2\/comments?post=3429"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/demo9.thuythu.vn\/reeco\/wp-json\/wp\/v2\/media\/3427"}],"wp:attachment":[{"href":"https:\/\/demo9.thuythu.vn\/reeco\/wp-json\/wp\/v2\/media?parent=3429"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/demo9.thuythu.vn\/reeco\/wp-json\/wp\/v2\/product_cat?post=3429"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/demo9.thuythu.vn\/reeco\/wp-json\/wp\/v2\/product_tag?post=3429"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}