XBS

The Hiden XBS RC system is a quadrupole mass spectrometer designed for monitoring multiple beam sources simultaneously, and uniquely offers beam acceptance through a 70° cone, transverse to the quadrupole axis.

Beam  acceptance  apertures  are  configured  individually  for  each  specific  process  chamber  source  position, manufactured as replaceable plug-in elements to enable retrospective modification in event of chamber alteration.

Hiden RC systems are directly controlled from a PC compatible computer via RS232 or Ethernet link, providing simultaneous data acquisition from multiple systems. The RC interface unit is a 90 mm high (2U), 19 inch rack mounting unit.  It is mains powered and includes power on and filament status indicators.

Windows®-MASsoft Professional PC software provides for fast data acquisition through either user configured acquisition files or pre-set modes selected by icon.

Features

• Fastaccess for Histogram, Trend Analysis and Analog peak 
• Mixedmode scanning, Trend Analysis, Histogram and Analog peaks in a multi-window display for exam
• Dataacquisition from multiple systems via Ethernet.
• Automaticmass scale alignment.
• Integralmass spectral library with full editing facilit
• Dataexport facility to ASCII format and to all Windows® devices for printing/plott
• Cursorfor peak height identification under mouse control.

The Hiden XBS RC system comprises:

• RCcontrol interface unit, 3 m Ethernet cable and T piece
• RFgenerator with preamplifier
• Analyserwith integral electron bombardment ion source, precision mass filter and detector
• 3mconnecting cables
• Windows®MASsoft Professional PC software

A PC compatible system is required additionally.