Mass spectrometer for residual gas analyzer

The Reecotech company is the sole distributor of Hiden Analytical’s residual gas analysis (RGA) system in Vietnam. The RGA system is a quadrupole mass spectrometer that is designed to analyze gas types using data collected in real time to give users instantly updated data on the status and partial pressure prediction of residual gas in a vacuum. The information is utilized for vacuum system pollution monitoring, process control, and environmental analysis.

Residual gas analysis mass spectrometry systems can monitor vacuum quality by identifying and quantifying contaminants in a vacuum environment. The RGA is a very sensitive tool for finding gas leaks.

The RGA is usually attached directly to the vacuum chamber. The system performs a variety of functions that are difficult to achieve with other analytical methods including analysis of reactions occurring in different gas phases, and monitoring of changes occurring in any gaseous environment. , vacuum leak detection, and mass flow controller testing.

Analysis parameters

Residual gas analysis analyzes low levels of residual gas that remain in a vacuum chamber following the pump down. Such gases may include residues from ambient air such as oxygen, nitrogen, and water, along with process residues that may include reactants such as silane, organometallics, halides, etc., and reaction products such as ammonia, hydrogen, moisture, etc.. Remaining gas System leaks and hydrocarbons that backstream into the process chamber from the pumping system can also cause pollutants to accumulate in vacuum chambers.

Principle of operation

The RGA effectively determines the chemical components of the gas within a vacuum, by ionizing the various gases present to create ions before determining their mass-to-charge ratio.